JPH0163796U - - Google Patents
Info
- Publication number
- JPH0163796U JPH0163796U JP1987158752U JP15875287U JPH0163796U JP H0163796 U JPH0163796 U JP H0163796U JP 1987158752 U JP1987158752 U JP 1987158752U JP 15875287 U JP15875287 U JP 15875287U JP H0163796 U JPH0163796 U JP H0163796U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- rotary drive
- expander
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987158752U JPH0163796U (en]) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987158752U JPH0163796U (en]) | 1987-10-19 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163796U true JPH0163796U (en]) | 1989-04-24 |
Family
ID=31439363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987158752U Pending JPH0163796U (en]) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163796U (en]) |
-
1987
- 1987-10-19 JP JP1987158752U patent/JPH0163796U/ja active Pending
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